JPH0245568Y2 - - Google Patents
Info
- Publication number
- JPH0245568Y2 JPH0245568Y2 JP10345084U JP10345084U JPH0245568Y2 JP H0245568 Y2 JPH0245568 Y2 JP H0245568Y2 JP 10345084 U JP10345084 U JP 10345084U JP 10345084 U JP10345084 U JP 10345084U JP H0245568 Y2 JPH0245568 Y2 JP H0245568Y2
- Authority
- JP
- Japan
- Prior art keywords
- piston
- rod
- bellows
- piston rod
- valve device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002265 prevention Effects 0.000 claims description 11
- 239000012530 fluid Substances 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10345084U JPS6119183U (ja) | 1984-07-09 | 1984-07-09 | 回り止め機構付き弁装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10345084U JPS6119183U (ja) | 1984-07-09 | 1984-07-09 | 回り止め機構付き弁装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6119183U JPS6119183U (ja) | 1986-02-04 |
| JPH0245568Y2 true JPH0245568Y2 (en]) | 1990-12-03 |
Family
ID=30662844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10345084U Granted JPS6119183U (ja) | 1984-07-09 | 1984-07-09 | 回り止め機構付き弁装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6119183U (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0798618B2 (ja) * | 1986-10-01 | 1995-10-25 | 株式会社東芝 | 群管理エレベ−タの制御装置 |
| JP4364036B2 (ja) * | 2004-03-30 | 2009-11-11 | 大日本スクリーン製造株式会社 | 単動空気シリンダ弁およびそれを備えた基板処理装置 |
| JP4296196B2 (ja) * | 2006-11-15 | 2009-07-15 | シーケーディ株式会社 | 真空弁 |
-
1984
- 1984-07-09 JP JP10345084U patent/JPS6119183U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6119183U (ja) | 1986-02-04 |
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